加工定制:是 | 品牌:Datenblatt | 型号: LabSpin6 |
用途:匀胶涂覆 |
Available LabSpin OptionsCover Plate for Optional FunctionsLabSpin systems can be equipped with a cover plate for optional functions that allows to variably position the resist dispense nozzle,therebenabling center dispense, wafer edge coating and edgebead removal. For develop processes a developer dispense systemand a nitrogen purge line for drying can also be adapted to the cover. |